HBO Microlithography Lamps for ASML i-line Systems
产品特点
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Designed for long lasting performance
- Qualified with ASML
应用领域
- Microlithography
安全建议
由于HBO灯的亮度高、紫外线辐射高、内压高（加热时），所有它只能在专为此目的设计的密闭外壳内工作。如果灯破裂，会释放水银。必须采取特定的安全措施。更多信息可根据要求索要，或可在与灯一起随附的宣传单或操作指示中查找。
由于HBO灯的亮度高、紫外线辐射高、内压高（加热时），所有它只能在专为此目的设计的密闭外壳内工作。如果灯破裂，会释放水银。必须采取特定的安全措施。更多信息可根据要求索要，或可在与灯一起随附的宣传单或操作指示中查找。
全系列产品介绍
HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.
产品参数
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数据参数表 | ||
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HBO 1003 W/PIL
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1003 W | 27.1 V | 85.0 mm | 195.0 mm | ||
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HBO 1500 W/PIL
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1500 W | 23.0 V | 118.0 mm | 273.0 mm | ||
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HBO 2100 W/PIL
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2100 W | 24.0 V | 118.0 mm | 240.0 mm | ||
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HBO 2500 W/PIL
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2500 W | 28.0 V | 149.0 mm | 340.0 mm | ||
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HBO 3500 W/PIL
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3500 W | 23.0 V | 154.0 mm | 360.0 mm | ||
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HBO 5500 W/PIL
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5500 W | 27.0 V | 154.0 mm | 325.5 mm | ||
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HBO 5510 W/PIHL
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5500 W | 29.0 V | 154.0 mm | 352.5 mm |